ALN-6L – AIN substrate polishing slurry
We developed ALN-6L to deliver the best surface finish on AlN substrates without void defect.
|PSD d50 (µm)||0.3|
|pH||2 – 3|
|Dilution||1 : 1|
Often used as a heat dissipator in integrated circuits or LED devices, aluminum nitride is well-known for its very high thermal conductivity. The grains of AlN ceramics are easily peeled off during polishing and cause void defect. We developed ALN-6L to deliver the best surface finish without void defect.
Download the technical datasheet to see application data.
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