SLT-50 slurry was developed for polishing Lithium Tantalate (LiTaO3) wafers, commonly used for SAW devices.
|pH||9 – 11||1 – 3|
|Dilution||1 : 4||1 : 1|
SLT-50 gives a superior removal rate than traditional slurries for a similar surface roughness. The slurry is supplied with component (A) and (B) and must be mixed according to the preparation instruction.
Download the technical datasheet to see application data.
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